| | | | | | | | | | | | | | | | | | | | | 5 17 | | | | | | | 2018 | | | | | | | | | | | | | | | | | | | | | | | | | | | | 800 | | | | | | 99.97% | 0.0009 | | | | | | | | | | | | | 2.0 — 3.0 GPa | | ; | SA508 Gr.4N | | | ; | 600 | | | | | | | | | | | 400 | | | | | | | | 30% | | ; | | | | | | | — 2000 | | | ; | | UV | ; | 200 | CMP | 10 | | | | | | | | | | | |